SFCV Series Small Thermal CVD Device for Graphene Development
High-temperature thermal CVD equipment of tubular furnace type suitable for various material development using hydrocarbon-based compounds such as graphene at universities and research institutions.
We have miniaturized the test pieces to allow for easy operation in producing small quantities and sizes, while simultaneously achieving significant cost reductions. Additionally, we have equipped them with pressure control functionality in the range of 5 to 100 Pa, which was previously considered difficult for small sizes, enabling support for a wider variety of processing patterns. Furthermore, for flammable gases based on hydrocarbons, we have safety devices such as equipment shutdown triggered by alarm detection and atmospheric gas dilution units. For more details, please download the catalog or contact us.
- 企業:佐藤真空
- 価格:Other